Numerical analysis of reaction forces at the supports of sliding microwire

Fazlar Rahman; M. A. Salam Akanda

doi:10.15282/jmes.14.4.2020.12.0586

Authors

Fazlar Rahman Department of Mechanical and Production Engineering (MPE), Ahsanullah University of Science and Technology (AUST), Dhaka, Bangladesh. Phone: 88-02-8870422 Ext: 235
M. A. Salam Akanda Department of Mechanical Engineering, Bangladesh university of Engineering and Technology (BUET), Dhaka, Bangladesh

DOI:

https://doi.org/10.15282/jmes.14.4.2020.12.0586

Keywords:

Microwire, Micro-Electro-Mechanical-Systems (MEMS), Finite Element Analysis (FEA), Frictional Reaction Force in MEMS, Sliding Microwire, microstructure

Abstract

The reaction forces at the tungsten support probes of a platinum microwire are determined by numerical analysis for different push-pull sliding velocities and contact pressures. The Finite Element Analysis (FEA) tool ANSYS Workbench is used to evaluate the contact stresses, reaction forces and deformations of the platinum microwire. The nonlinear contact analysis and contact formulations are implemented to ensure that the platinum microwire maintained contact with the tungsten support probes during push-pull sliding motion, and transfer frictional forces between contact surfaces without penetration and separation. The reaction forces at the support probes are found independent of the sliding velocity of the platinum microwire and vary with normal contact pressure. The results found in the numerical analysis are validated through experimental works. Due to the tiny size, the nonlinearity of contacts and indeterminate supports criteria, it is difficult to determine the reaction forces at the supports of a sliding microwire by conventional mechanics. The method of the numerical analysis of the sliding microwire presented in this paper can be used to determine the reaction forces of other microstructures, validate the experimental results, as well as to evaluate total disturbance forces in the microstructures where relative motion exists; which are important for the proper design and failure analysis of the MEMS devices and microstructures.

References

TechnologyWatch, An Introduction to MEMS (Micro-electromechanical Systems). Loughborough University, UK: PRIME Faraday Partnership, 2002.

"What is MEMS Technology," https://www.memsnet.org/mems/what_is.html,2018 [Online].

T. Buchheit, B. Boyce, and G. Wellman, "The role of microstructure in MEMS deformation and failure," in ASME 2002 International Mechanical Engineering Congress and Exposition, 2002, pp. 559-566.

T. M. Adams and R. A. Layton, "MEMS transducers—An overview of how they work," in Introductory MEMS, ed: Springer, 2010, pp. 167-210.

J. K. Sakellaris, "Finite element analysis of micro-Electro-Mechanical systems: Towards the integration of MEMS in design and robust optimal control schemes of smart microstructures," WSEAS Transactions on Applied and Theoretical Mechanics, pp. 114-124, 2008.

M. Pustan, S. Paquay, V. Rochus, and J.-C. Golinval, "Modeling and finite element analysis of mechanical behavior of flexible MEMS components," Microsystem Technologies, vol. 17, pp. 553-562, 2011.

Q.-S. Bai, K. Cheng, B. He, and Y.-C. Liang, "Design of a novel tensile testing device and its application in tensile testing experiments on copper micro wires," Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, vol. 226, pp. 1594-1600, 2012.

M. Razali, A. Mahmud, N. Mokhtar, and J. Abdullah, "Finite-element analysis of NiTi wire deflection during orthodontic levelling treatment," in IOP Conference Series: Materials Science and Engineering, 2016, p. 012040.

M. S. Akanda, H. Tohmyoh, and M. Saka, "Precision friction measurement between ultrathin wire and microprobe," Sensors and Actuators A: Physical, vol. 172, pp. 189-194, 2011.

S. A. Baranov, V. S. Larin, and A. V. Torcunov, "Technology, preparation and properties of the cast glass-coated magnetic microwires," Crystals, vol. 7, p. 136, 2017.

T. Tsuchiya, T. Hemmi, J.-y. Suzuki, Y. Hirai, and O. Tabata, "Tensile strength of silicon nanowires batch-fabricated into electrostatic MEMS testing device," Applied Sciences, vol. 8, p. 880, 2018.

D. L. Chandler, "New way to grow microwires," ed. MIT News Office, 2011.

H. Tohmyoh, M. Abdus Salam Akanda, and Y. Nobe, "Mechanical properties of thin Al wires prepared by electromigration," Journal of the Physical Society of Japan, vol. 81, p. 094803, 2012.

J. Biener, A. V. Hamza, and A. Hodge, "Deformation behavior of nanoporous metals," in Micro and nano mechanical testing of materials and devices, ed: Springer, 2008, pp. 118-135.

"Contact Technology Guide Release 12.1," ANSYS Inc., 2009.

"Introduction to ANSYS Mechanical: Modeling Connection Release 15.0 " ANSYS Inc, 2012.

G. Ulises, "Modeling and simulating MEMS devices using finite element analysis," in Proceedings of 2001 ASME International Mechanical Engineering Congress and Exposition, New York, NY, United States, 2001, pp. 2583-2587.

H. Ren and J. Yao, "FEA in Micro-Electro-Mechanical Systems (MEMS) Applications: A Micromachined Spatial Light Modulator (μSLM)," Finite Element Analysis: New Trends and Developments, pp. 161-182, 2012.

W. A. Siswanto, M. Nagentrau, and A. L. Mohd Tobi, "Prediction of residual stress using explicit finite element method," Journal of Mechanical Engineering and Sciences, vol. 9, pp. 1556-1570, 2015.

J. Wikström, "Finite element simulations of microbeam bending experiments," 2017.

F. Golesorkhie and M. Navi, "Effects of geometric variations on buckling properties of carbon nanostructures: A finite element analysis," Journal of Mechanical Engineering and Sciences, vol. 14, pp. 6473-6487, 2020.

B. Xu, B. Zhao, and Z. Yue, "Finite element analysis of the indentation stress characteristics of the thin film/substrate systems by flat cylindrical indenters," Materialwissenschaft und Werkstofftechnik: Entwicklung, Fertigung, Prüfung, Eigenschaften und Anwendungen technischer Werkstoffe, vol. 37, pp. 681-686, 2006.

R. P. Barrett, "ANSYS Nonlinear Convergence Best Practices," CAE Associates, 2012.

H. Tohmyoh, M. S. Akanda, and M. Saka, "Small-span bending test for determination of elastic-plastic properties of ultrathin Pt wires," Applied Physics A, vol. 103, pp. 285-291, 2011.

M. A. S. Akanda, H. Tohmyoh, and M. Saka, "An integrated compact unit for wide range micro-Newton force measurement," Journal of Solid Mechanics and Materials Engineering, vol. 4, pp. 545-556, 2010.

M. C.-Y. Niu, "Airframe stress analysis and sizing," Hong Kong Conmilit Press Limited, 1997.

F. Yang and J. C.-M. Li, Micro and nano mechanical testing of materials and devices: Springer, 2008.

H.-H. Lee, Finite Element Simulations with ANSYS Workbench 2019: SDC Publications, 2019.