Dynamic and sensitivity analysis of V-shaped cross section piezoelectric beam as mass sensor for high-order vibration modes
DOI:
https://doi.org/10.15282/jmes.19.3.2025.6.0844Keywords:
V-shape, Mass sensor , Piezoelectric beam , Vibration modes , Sensitivity analysisAbstract
Resonators represent a new generation of sensors with superior performance and high sensitivity, making them well-suited for mass sensing applications. While V-shaped cross-section beams have demonstrated enhanced particle absorption and improved performance over conventional rectangular beams in the first bending mode, their behavior in higher-order vibration modes including lateral bending, torsion, and in-plane bending remains unexplored. This study presents a dynamic model of the vibratory motion of V-shaped beams after particle adsorption, employing both modal analysis and finite element methods. A sensitivity analysis based on Sobol’s method is conducted to evaluate the influence of beam geometry on resonance frequency shifts post-adsorption and to quantify the extent of this effect. Simulation results reveal that V-shaped cross-section beams exhibit superior performance compared to rectangular beams not only in the fundamental bending mode but also in higher-order vibration modes, including lateral bending, torsion, and in-plane bending. These findings highlight the potential of V-shaped resonators for advanced mass sensing applications requiring multi-mode vibrational sensitivity.
References
[1] H. Sharifi, S. Eskandari, “Sensing blood components and cancer cells with photonic crystal resonator biosensor. Results in Optics, vol. 14, p. 100593, 2024.
[2] H. Bahri, A. Hocini, H. Bensalah, S. Mouetsi, S. Ingebrandt, V. Pachauri, et al., “A high-sensitivity biosensor based on a metal–insulator–metal diamond resonator and application for biochemical and environment detections,” Optik, vol. 271, p. 170083, 2022.
[3] W. Yu, A. Banerjee, J. Hirotani, T. Tsuchiya, “Enhancing responsivity and detection limit in tunable nano-electromechanical system resonator mass sensors,” Japanese Journal of Applied Physics, vol. 63, no. 3, p. 03SP74, 2024.
[4] X. Xiao, S.-C. Fan, C. Li, “The effect of edge mode on mass sensing for strained graphene resonators,” Micromachines, vol. 12, no. 2, p. 189, 2021.
[5] D. Sank, M. Khezri, S. Isakov, J. Atalaya, “Balanced coupling in electromagnetic circuits,” Physical Review Applied, vol. 23, no. 2, p. 024012, 2025.
[6] B. Harpt, J. Corrigan, N. Holman, P. Marciniec, D. Rosenberg, D. Yost, et al., “Ultra-dispersive resonator readout of a quantum-dot qubit using longitudinal coupling,” npj Quantum Information, vol. 11, no. 1, p. 5, 2025.
[7] S. Bannur Nanjunda, V. N. Seshadri, C. Krishnan, S. Rath, S. Arunagiri, Q. Bao, et al., “Emerging nanophotonic biosensor technologies for virus detection,” Nanophotonics, vol. 11, no. 22, p. 5041–5059, 2022.
[8] Z. Jiang, B. Feng, J. Xu, T. Qing, P. Zhang, Z. Qing, “Graphene biosensors for bacterial and viral pathogens,” Biosensors and Bioelectronics, vol. 166, p. 112471, 2020.
[9] V. Puerto-Belda, J. J. Ruz, C. Millá, Á. Cano, M. L. Yubero, S. García, et al., “Measuring vibrational modes in living human cells,” PRX Life, vol. 2, no. 1, p. 013003, 2024.
[10] M. Katta, R. Sandanalakshmi, V. Veerraju, “Microcantilever geometry analysis for array sensor design,” Materials Today: Proceedings, vol. 50, p. 1496–1501, 2022.
[11] H. Darban, “Size effect in ultrasensitive micro-and nanomechanical mass sensors,” Mechanical Systems and Signal Processing, vol. 200, p. 110576, 2023.
[12] H. Chen, M. Xiao, J. He, Y. Zhang, Y. Liang, H. Liu, et al., “Aptamer-functionalized carbon nanotube field-effect transistor biosensors for Alzheimer’s disease serum biomarker detection,” ACS Sensors, vol. 7, no. 7, p. 2075–2083, 2022.
[13] H. M. Sedighi, M. Malikan, “Stress-driven nonlocal elasticity for nonlinear vibration characteristics of carbon/boron-nitride hetero-nanotube subject to magneto-thermal environment,” Physica Scripta, vol. 95, no. 5, p. 055218, 2020.
[14] M. Xiao, C. Xia, D.F. Wang, “A mass-position sensing scheme using a geometrically adjustable resonator with low-order modals for detecting multiple analytes,” IEEE Transactions on Instrumentation and Measurement, vol. 72, p. 1–12, 2023.
[15] R. Perelló-Roig, S. Barceló, J. Verd, S. Bota, J. Segura, “Geometrically engineered mass sensing CMOS-MEMS resonators for temperature compensation via folded anchors,” Sensors and Actuators A: Physical, vol. 373, p. 115435, 2024.
[16] F. Xu, Y. Wei, S. Bian, H. Wang, D. -R. Chen, D. Kong, “Simulation-based design and optimization of rectangular micro-cantilever-based aerosols mass sensor,” Sensors, vol. 20, no. 3, p. 626, 2020.
[17] A. M. Upadhyaya, M. C. Srivastava, P. Sharan, “Integrated MOEMS based cantilever sensor for early detection of cancer,” Optik, vol. 227, p. 165321, 2021.
[18] W. O. Nyang’au, A. Setiono, A. Schmidt, H. Bosse, E. Peiner, “Sampling and mass detection of a countable number of microparticles using on-cantilever imprinting,” Sensors, vol. 20, no. 9, p. 2508, 2020.
[19] P. G. Saiz, D. Gandia, A. Lasheras, A. Sagasti, I. Quintana, M. I. Arriortua, et al., “Enhanced mass sensitivity in novel magnetoelastic resonators geometries for advanced detection systems,” Sensors and Actuators B: Chemical, vol. 296, p. 126612, 2019.
[20] D. Nicklin, H. Gohari Darabkhani, “Design, modelling, and experimental validation of a glass U-tube mass sensing cantilever for particulate direct-on-line emissions measurement,” Atmosphere, vol. 14, no. 6, p. 915, 2023.
[21] K. Guo, B. Jiang, B. Liu, X. Li, Y. Wu, S. Tian, et al., “Study on the progress of piezoelectric microcantilever beam micromass sensor,” in IOP Conference Series: Earth and Environmental Science, vol. 651, p. 022091, 2021.
[22] J. Pang, X. Le, K. Pang, Z. Xu, C. Gao, J. Xie, “Modified coefficient of equivalent mass to explain decreased relative sensitivity of piezoelectric cantilever humidity sensor in high mode,” Journal of Microelectromechanical Systems, vol. 29, no. 4, p. 452–454, 2020.
[23] J. Qian, H. Begum, J. E.-Y. Lee, “Acoustofluidic localization of sparse particles on a piezoelectric resonant sensor for nanogram-scale mass measurements,” Microsystems & Nanoengineering, vol. 7, no. 1, p. 61, 2021.
[24] P. Joshi, S. Kumar, V. K. Jain, J. Akhtar, J. Singh, “Distributed MEMS mass-sensor based on piezoelectric resonant micro-cantilevers,” Journal of Microelectromechanical Systems, vol. 28, no. 3, pp. 382–389, 2019.
[25] A. Niranjan, P. Gupta, M. Rajoriya, “Piezoelectric MEMS micro-cantilever biosensor for detection of SARS–CoV2,” in 2021 International Conference on Communication, Control and Information Sciences (ICCISc), pp. 1-5, 2021.
[26] S. Chauhan, M. Z. Ansari, “Vacuum-assisted piezoelectric cantilever mass sensor performance,” Journal of Mechanical Science and Technology, vol. 35, pp. 5489–5494, 2021.
[27] R. Gao, Y. Zhang, J. Zhao, S. Liu, “A novel V-shaped cross section cantilever sensor for monitoring concentrated masses with improved detecting sensitivity and measuring accuracy,” IEEE Sensors Journal, vol. 14, no. 2, pp. 514–521, 2013.
[28] R. P. Brent. Algorithms for Minimization without Derivatives. 1st Ed. New York: Courier Corporation, 2013.
[29] J. Zhao, R. Gao, S. Liu, Y. Huang, “A new sensitivity-improving method for piezoelectric resonance mass sensors through cantilever cross-section modification,” IEEE Transactions on Industrial Electronics, vol. 61, no. 3, pp. 1612–1621, 2013.
[30] F. Hejazi, H. M. Esfahani. Interpretive Solutions for Dynamic Structures Through ABAQUS Finite Element Packages. 1st Ed. Boca Raton: CRC Press, 2021.
[31] H. Korayem, R. Ghaderi, “Sensitivity analysis of nonlinear vibration of AFM piezoelectric microcantilever in liquid,” International Journal of Mechanics and Materials in Design, vol. 10, no. 2, pp. 121–131, 2014.
[32] R. Ghaderi, B. M. Dehkordi, A. R. Fard, “Vibration and sensitivity analysis of double-layered non-uniform piezoelectric microcantilever as a self-sensing mass sensor,” Physica Scripta, vol. 96, no. 11, p. 115205, 2021.
[33] M. Korayem, M. Taheri, S. Ghahnaviyeh, “Sobol method application in dimensional sensitivity analyses of different AFM cantilevers for biological particles,” Modern Physics Letters B, vol. 29, no. 22, p. 1550123, 2015.
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