Micro-cantilever sensor principle, design, fabrication and application: A review
DOI:
https://doi.org/10.15282/jmes.19.1.2025.4.0821Keywords:
Micro-cantilever, Sensor, MEMS, Operational modes, SensitivityAbstract
Micro-cantilever sensors have emerged as a transformative technology in the fields of physical, chemical, and biological sensing. Their ability to detect minute forces and changes at the nanoscale makes them ideal for applications that demand high sensitivity and portability. While these sensors have gained prominence across various domains, including medical diagnostics, environmental monitoring, and industrial testing, the field faces ongoing challenges related to their fabrication, sensitivity, and integration. This review provides a comprehensive overview of micro-cantilever sensor technology, focusing on advancements in their operating principles, design, fabrication methods, and diverse applications. Despite their many advantages, including low cost, portability, and high sensitivity, micro-cantilever sensors are still limited by issues such as fabrication difficulties, reliability, and scalability. This work aims to address these challenges by examining current trends, identifying gaps in the literature, and proposing potential solutions for overcoming the technical barriers. Key areas covered include the development of novel materials, fabrication techniques, and sensor integration methods, with a particular focus on their applications in healthcare, food safety, environmental monitoring, and explosive detection. Furthermore, the review explores the future potential of micro-cantilever sensors in emerging fields such as point-of-care diagnostics and personalized medicine. By consolidating existing knowledge and identifying areas for further research, this review highlights the importance of advancing micro-cantilever technology to enable new applications and improve existing ones. Ultimately, this work aims to contribute to the development of more reliable, scalable, and versatile sensing devices, thus expanding the potential for micro-cantilever sensors to impact a wide range of industries and applications.
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