Nguyen, M. N., Nguyen, L. Q., Chu, H. M., & Vu, H. N. (2019). A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity. Journal of Mechanical Engineering and Sciences, 13(3), 5334–5346. https://doi.org/10.15282/jmes.13.3.2019.09.0435