Nguyen, M. N.; Nguyen, L. Q.; Chu, H. M.; Vu, H. N. A Two Degrees of Freedom Comb Capacitive-Type Accelerometer With Low Cross-Axis Sensitivity. J. Mech. Eng. Sci. 2019, 13 (3), 5334-5346. https://doi.org/10.15282/jmes.13.3.2019.09.0435.