NGUYEN, M. N.; NGUYEN, L. Q.; CHU, H. M.; VU, H. N. A two degrees of freedom comb capacitive-type accelerometer with low cross-axis sensitivity. Journal of Mechanical Engineering and Sciences, [S. l.], v. 13, n. 3, p. 5334–5346, 2019. DOI: 10.15282/jmes.13.3.2019.09.0435. Disponível em: https://journal.ump.edu.my/jmes/article/view/1007. Acesso em: 29 mar. 2024.